Harsh duty processes in the semiconductor production always provide new challenges for vacuum pumps.
半导体生产中的严酷工作过程总是会向真空泵提出新的挑战。
Based on the proven technology of the dry multi-stage roots pumps, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology and less.
基于罗茨干式多级泵的被证实的技术，PV以A3H系列提供了泵解决方案，该方案以45 nm及更小的技术为300mm晶圆配备了不同的泵送速度。
 
A3H dry pumps for harsh duty processes Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps.
用于半导体生产中严苛工作过程的A3H干式泵总是会向真空泵提出新的挑战。
 
Based on the proven multi-stage Roots technology, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology nodes and less.
基于罗茨多级泵的被证实的技术，PV以A3H系列提供了泵解决方案，该方案以45 nm及更小的技术为300mm晶圆配备了不同的泵送速度。
 
Compared to previous process pumps, the gas throughput, particle tolerance and condensation resistance have been increased significantly.
与以往过程泵比较，气体生产量、粒子容忍度和防冷凝已经得到显著提高。
Their multi-stage Roots technology guarantees a particle-free and dry vacuum.
其罗茨多级技术确保提供了无颗粒的干式泵。
The pumps are equipped with temperature sensors and inert gas flushing.
泵配备有温度传感器和惰性气体冲洗装置。
The optimal solution for the most demanding processes.
服务于最为需要的过程的可选解决方案
The dry pumps of the A3H series, through the use of corrosion-resistant materials, are optimal for demanding CVD processes in the semiconductor, photovoltaic or flat panel display production.
A3H系列干式泵，通过使用防腐蚀材料，是半导体、光伏或平板显示器生产中迫切需要CVD过程的可选解决方案。
The high gas throughput is another characteristic of the series.
高气体生产量是该系列的另一个特点。
A low noise emission and a low vibration level distinguish these multi-stage Roots pumps.
They are compliant with CE and Semi S2 standards.
较低噪音释放和较低振动水平使此等罗茨多级泵与众不同。
The A3H series for the most demanding processes saves operating costs The usage of these dry pumps supports a decrease in operating costs through low energy consumption.
服务与最为需要的过程的A3H系列节省了运营成本。此等干式泵的使用通过较低能量消耗实现对运营成本降低的支持。
Through the improved particle tolerance and the condensation resistance, the maintenance intervals and the lifetime of the pumps could be extended, which means an additional reduction of operating costs.
通过改进的粒子容忍度和防冷凝，维护间隔和泵的寿命是可以得到延长的，这意味着又一次运营成本的减少。
 
Advantages
优势
Longer maintenance intervals through improved particle tolerance and condensation resistance Optimal efficiency for demanding CVD processes through the use of more corrosion-resistant materials and high gas throughput Reduced operating costs through minimal energy consumption Minimal space needed through compact construction Low noise emission and low vibration level Compliant with CE and Semi S2 standards
通过改进的粒子容忍度和防冷凝而实现的更长维护间隔期；通过使用更好防腐蚀材料和高气体生产量而实现的服务于迫切需要的CVD过程的可选效率；通过最小化能量消耗而实现降低运营成本；通过紧凑结构设计实现只需最小的空间；低噪音释放和低振动水平；符合CE和Semi S27标准。
 
The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10-2 hPa.
ACP系列罗茨多级泵的设计目的就是为了在压力范围为大气压力和3 x 10-2 hPa之间的无油无粒子应用场合的。
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余气体分析系统、电子显微镜或UHV系统的情况下，空气冷却泵是旋转叶片泵的最佳替代物。
 
Light duty processes require a clean and dry vacuum.
轻载过程需要一个清洁和干燥真空环境。
The multi-stage roots pumps by PV are the ideal solution for industrial applications and Research & Development.
PV罗茨多级泵是工业应用和研究开发场合下的理想解决方案。
Dry pumps for light duty processes Based on the proven technology of the dry multi-stage roots pumps, PV offers a wide selection of high power pumps for light duty processes.
服务与轻载过程的干式泵
基于罗茨干式多级泵的被证明技术，PV提供服务于轻载过程的高能泵的广泛选择方案。
The most important characteristics for pumps in these applications are a high pumping speed and robustness as well as high reliability.
此等应用中的泵的最重要的特点就是高泵送速度、健壮性和可靠性。
Air-cooled multi-stage roots pumps from the ACP series The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10 -2 hPa.
ACP系列的罗茨空气冷却多级泵
ACP系列的罗茨多级泵设计目的就是为了在压力范围为大气压力和3 x 10-2 hPa之间的无油无粒子应用场合的。
 
 
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余气体分析系统、电子显微镜或UHV系统的情况下，空气冷却泵是旋转叶片泵的最佳替代物。
 
They are ideal as a roughing pump for turbomolecular pumps.
作为用于低真空泵，它们是用于涡轮分子泵的理想解决方案。
The specially developed G version of the pumps is designed for the transportation of traces of corrosive gases.
经过特别开发的此等泵的G版本的设计目的就是为了运输腐蚀性气体的残留。
This version of the ACP series is recommended for transfer chambers, process monitoring systems and ion beam applications.
ACP系列版本是推荐用于运输室、过程监视系统和离子束应用场合的。
The CV version of the air-cooled ACP series has a water vapor capacity of up to 1,000 grams per hour.
空气冷却ACP系列的CV版本具有的水蒸汽容量可达1,000g/h。
It is designed to avoid steam condensation in the pump block.
其设计就是为了避免泵体内的蒸汽冷凝。
ACP 120 and ACG 600 for industrial applications Based on the tens of thousands of semiconductor process pumps installed worldwide, the ACP 120 provides the advantages of the multi-stage roots pumps in industrial applications as well.
用于工业应用场合的ACP 120和ACG 600
基于安装于全世界范围的上万台半导体过程泵的应用实践，ACP 120也具备了工业应用中罗茨多级泵的优点。
The water-cooled pump can be obtained as a standard version for light duty applications as well as a purge gas version for slightly corrosive processes or for pumping down condensable mediums.
水冷却泵可以作为用于轻载应用版本而获得，也可以作为浪涌气体版本用于轻微腐蚀性过程的应用场合，或者用于泵送可冷凝介质的应用场合。
The ACP 120 can be combined into different pumping stations with roots pumps.
ACP 120 可以组合进带罗茨泵的不同泵送站。
The roots pumping station ACG 600 may be the basis of a completely lubricant-free pumping system for vacuum solutions in the decorative or tool coating.
罗茨泵送站ACG 600可以是用于装饰或工具喷涂真空解决方案的一个完整的免润滑泵送系统的基础。
The compact dry pump: the A 100 L The compact dry pump A 100 L was developed for the cost-saving integration in semiconductor production systems.
紧凑型干式泵：A100 L
紧凑型干式泵A 100 L的开发目的就是为了应用于半导体生产系统的节约成本的集成方案。
 
The multi-stage roots pump is suitable for usage in clean rooms and can replace external pumps with a significantly higher pumping speed.
罗茨多级泵适合于清洁空间应用场合，而且能够以可观的更高泵送速度替换外部泵。
Through variably adjustable speeds in the standby mode, the power consumption of the compact dry pump A 100 L can be additionally lowered.
通过调整备用模式中的可调速度，紧凑型干式泵A 100 L的能量消耗是进一步得到降低。
 
Integrated pumps of the A100 series for light duty processes The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities.
服务于轻载过程的A100系列的集成泵
具有紧凑结构尺寸的A100系列泵是为半导体工厂中弹性集成而专门开发。
Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
设计为直接在工具上安装和快速的泵送，该系列用于轻载应用的紧凑型泵是负载锁、运输室以及其他非腐蚀性应用的完美解决方案。
 
Integrated pumps set standards Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry.
集成泵设定了有关标准。鉴于A 100 L泵的市场集成，它们革新了服务于半导体行业生产设施的多泵集成方案。
Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times.
基于罗茨干式多级泵技术，尽管只有较小尺寸，A 100 系列泵提供了高泵送速度和短泵送时间。
Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.
今天，集成轻载泵是最先进的，A100系列是在全世界范围许多300 mm半导体晶圆工厂内安装的。
Integrated pumps for load-lock and transfer chambers In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations.
在轻载应用场合服务于负载锁和运输室的集成泵清除了泵安装中的真空线路效应的影响。
Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series.
通过使用A100 系列，可以降低真空线路、集成和调试的安装成本。
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